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DH2N
High-precision Non-contact Depth Measuring Microscope
with Nomarski DIC (Differential Interference Contrast)
DH2N is a high-precision non-contact depth
measuring system using a precise focus indicator technology (Target
Mark). DH2N can show minute roughness, bumps, steps under the Nomarski
DIC observation technique, enabling detection of minute or microscopic
nicks, dust or foreign material.
Applications:
• Measuring height/depth and detecting defect parts of semiconductor
pressure sensor or anisotropic etching
• Measuring depth of crystal boards cutting lines
• Image analysis of VIA holes of GaAs, Inp boards
• Measuring height and detecting surface defects of solder balls
of µBGA
Specifications
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Binocular |
Trinocular |
| MAIN BODY |
Stand with Built-in Power Supply for Reflected &
Transmitted Illumination |
Yes |
Yes |
| BRACKET |
Coarse and Coaxial Focus Unit with Precise Focus
Indicator, Reflected Illuminator and Nomarski (DIC) |
Yes |
Yes |
| ERECT BINOCULAR |
Monocular Tube with C-Mount |
Yes |
|
| ERECT TRINOCULAR |
Binocular Tube with C-Mount |
|
Yes |
| X,Y Stage |
505S |
50X50mm Travel, Stage Glass |
To be selected |
| 505L |
50X50mm travel (with T-grooves), Stage
glass |
To be selected |
| 510 |
100X50mm travel (with T-grooves), Stage
glass |
To be selected |
| 510D |
100X50mm Travel (with T-grooves), Stage
Glass, Linear Scale 2 Axis Digital Readout 1µm reading (optional) |
To be selected |
| 100D |
100X100mm travel, Stage Glass, Linear
Scale3 Axis Digital Readout 1µm reading (optional) |
To be selected |
| Eyepiece NWF 10X |
10X/16mm, with G-14M reticle |
Yes |
Yes |
| Eyepiece NWF 10X |
10X/16mm |
|
Yes |
| OBJECTIVES |
PLM, PLLWDM, SPLM series |
To be selected |
| Z-AXIS INDICATOR |
1µm Reading, 25mm Travel |
Yes |
Yes |
| OPTIONS |
Z-axis indicator with 0.1µm Reading,
Photography System, Digital Imaging System, etc. |
To be selected |
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