Hisomet II (DH2)
The Hisomet is a non-contact depth measuring microscope that has been designed based on the optical focal point detection system. The precise focus indicator is adopted, so that the measurements of height, depth, steps, etc. are made possible simply by coinciding the two halves of an index graticule while observing the surface of a point of measurement. As measurements can be made without concern for causing distortion or nicks to a specimen, Hisomet is ideal for measuring electronic components such as ICs and other precision parts.
Hisomet is highly appreciated by manufacturers for its accurate measurements and inspections of objects, such as ICs, magnetic heads, electronic components, precision parts, etc. Material and forms of specimens used in these industries are diversified.
Principle of Measurement
This microscope system offers a precise focus indicator consisting of a beam splitting prism, and black and white-stripe graticles built into the reflected-light optical system of the microscope, and has been designed based on the optical pricniple that at the correct focus, the clear image of the index graticle, of which the upper and lower halves coincide, can be observed above the focused image of a specimen, and that when defocused even slightly, the index line is split into two lines in the upper and lower halves of the graticle.
Method of Measurement
The exact focal point is secured by confirming that the vertical index lines in the upper and lower halves of the graticle coincide to fuse into exact straight lines, rather than by making judgments as to whether or not the image of a specimen surface is blurred. Since this is a unique system that is neither affected by the focal depth of objective lenses nor dependent on the ability of the human eye to discriminate two points, the focal point can be determined very accurately in comparison with other focusing systems. This focusing system and the digital gauge allow non-contact, high precision measurements of step heights between surfaces.
As a focal point is detected under the non-contact optical method, measurements can be made without being affected by physical damage to a specimen, such as distortion, nicks, etc.
Since the precise focus indicator based on the "split-target method has been adopted, highly-accurate depth (step) measurements can be made simply by coinciding the two halves of the graticle.
This system is ideal for use at application sites because its handling procedures are as simple as those of microscopes.
While observing the submicron surface condition of a point of measurement, the positional relation between a reference point of measurement and a point of measurement can be confirmed, and measurements can also be made in the same field of view.
Measurement accuracy can be increased through the use of high magnification objective lenses.
Either a black or white-stripe graticle can be chosen in accordance with the reflectivity of specimen surfaces. The "open" position of the three stage selecting lever can be used when photographs are to be taken without a graticle.
Various models can be configured by the combination of different equipment such as a optical head, measuring stage, TV equipment, etc., depending on the applications of respective users.